| 摘要 |
PROBLEM TO BE SOLVED: To more precisely measure an aiming electrostatic capacity value or ohmic value, or from a different viewpoint, a stack height, by measuring the electrostatic capacity value or the ohmic value of a structure produced with a gas deposition method. SOLUTION: The apparatus for producing a structure comprises an aerosol generator, a nozzle for spouting the aerosol particles, and a means for measuring the electrostatic capacity value or the ohmic value of the produced structure. The apparatus produces the structure by colliding particles in an aerosol having particles dispersed in a gas to a substrate at a high speed. COPYRIGHT: (C)2005,JPO&NCIPI
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