| 发明名称 |
Narrow fin finfet |
| 摘要 |
A narrow channel FinFET is described herein with a narrow channel width. A protective layer may be formed over the narrow channel, the protective layer being wider than the narrow channel.
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| 申请公布号 |
US2004197975(A1) |
申请公布日期 |
2004.10.07 |
| 申请号 |
US20040830006 |
申请日期 |
2004.04.23 |
| 申请人 |
KRIVOKAPIC ZORAN;AN JUDY XILIN;DAKSHINA-MURTHY SRIKANTESWARA;WANG HAIHONG;YU BIN |
发明人 |
KRIVOKAPIC ZORAN;AN JUDY XILIN;DAKSHINA-MURTHY SRIKANTESWARA;WANG HAIHONG;YU BIN |
| 分类号 |
H01L21/336;H01L29/423;H01L29/786;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/336 |
| 代理机构 |
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代理人 |
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| 主权项 |
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