MICRO MIRROR ELEMENT INCLUDING DIELECTROPHORETIC LIQUID

摘要

PROBLEM TO BE SOLVED: To maximize the array density of a micro mirror element by suppressing the size of the micro mirror element to the minimum, to increase the driving force generated by given driving energy and acting on the micro mirror element, and to suppress the driving energy necessary for generating the driving force of the micro mirror element to the minimum. SOLUTION: The micro mirror element includes: a substrate (20) having a surface (22); and a plate (30) which is separated from the surface of the substrate and directed substantially in parallel to the surface of the substrate. The plate and the substrate define a cavity (50) between them. A dielectrophoretic liquid (53) which can move when an electric signal is applied on the micro mirror element is arranged in the cavity, and a reflection element is arranged between the surface of the substrate and the plate. The reflection element (42) is so composed to move between a first position and at least one of second positions. COPYRIGHT: (C)2005,JPO&NCIPI