发明名称 Method of applying adhesive
摘要 An applying method for an adhesive according to an embodiment includes the following steps. First, gas is exhausted from a first exhaust pipe, so as to eliminate a part of the gas in a closed container. Next, the gas continues to be exhausted from the first exhaust pipe, so as to have the adhesive in the transmission pipeline become bubbled, and also to convey the bubbled adhesive to reach the supply vent. Later, gas is exhausted from the second exhaust pipe and continues to be exhausted from the first exhaust pipe, so as to greatly exhaust the gas in the closed container, and also to increase bubbling in the adhesive. Subsequently, the gas continues to be exhausted from the second exhaust pipe and ceases to be exhausted from the first exhaust pipe, so as to cause the adhesive to reach a gasified state. Also the gasified adhesive is supplied to the closed container from the supply vent, so that the gasified adhesive can adhere to and coat above the SiO2 layer. Finally, gas may be exhausted from the first exhaust pipe and ceases to be exhausted from the second exhaust pipe, so that the remaining gasified adhesive in the closed container is pumped out.
申请公布号 US2004197473(A1) 申请公布日期 2004.10.07
申请号 US20030668436 申请日期 2003.09.22
申请人 MOSEL VITELIC,INC. 发明人 WU MIFONG;YEH CHUNG-CHIH
分类号 C23C14/12;H01L21/312;(IPC1-7):C23C16/00 主分类号 C23C14/12
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