| 发明名称 |
Potassium hydrogen peroxymonosulfate solutions |
| 摘要 |
A solution comprising potassium hydrogen peroxymonosulfate containing an elevated level of KHSO5 and having a weight ratio of SO5 to SO4 of greater than 1.0:1, and its use in microetching metal substrates is disclosed.
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| 申请公布号 |
US2004197261(A1) |
申请公布日期 |
2004.10.07 |
| 申请号 |
US20030404200 |
申请日期 |
2003.03.31 |
| 申请人 |
TUFANO THOMAS PETER;COXEY MICHAEL BRIAN |
发明人 |
TUFANO THOMAS PETER;COXEY MICHAEL BRIAN |
| 分类号 |
C01B15/08;C23F1/18;H01L21/321;H05K3/38;(IPC1-7):C01B15/08 |
主分类号 |
C01B15/08 |
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