SEMICONDUCTOR ELECTROSTATIC MOTOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor electrostatic motor which rotates uniformly at a high speed by a simple step by suppressing the flowing out of a charge from the first impurity adding part 1b of a movable element to a semiconductor substrate 1a of the movable element by the channel on the surface of the semiconductor substrate to become a cause for bringing about a rotating unevenness. SOLUTION: The entirety or at least the part of the surface of the semiconductor substrate 1a of the p-type movable element except the first impurity adding part 1b of the movable element of an n-type semiconductor of an electron supply source is formed as a p-type high concentration impurity adding part. A channel formation for deteriorating rotating characteristics is suppressed or made harmless. During the operation of the semiconductor electrostatic motor, the charge does not flow out from the first impurity adding part 1b of the movable element of the electron supply source. Thus, the semiconductor electrostatic motor which can rotate at a high speed and which does not have a rotating unevenness can be provided. COPYRIGHT: (C)2005,JPO&NCIPI