THIN FILM PIEZOELECTRIC ACTUATOR FOR DISC DRIVE AND ITS FABRICATING PROCESS

摘要

PROBLEM TO BE SOLVED: To prevent the piezoelectric constant of the thin film piezoelectric layer 33 in a thin film piezoelectric element 30 of a thin film piezoelectric actuator for disc drive from lowering below a compression stress, and to fabricate a highly reliable actuator 10 at a low cost.

SOLUTION: A first electrode layer 31, an orientation control layer 32, the thin film piezoelectric layer 33 and a second electrode layer 34 are formed sequentially on a substrate having a linear expansion coefficient smaller than that of the thin film piezoelectric layer 33 thus fabricating the thin film piezoelectric element 30. A residual stress acting in the direction perpendicular to the thickness direction in the thin film piezoelectric layer 33 of the thin film piezoelectric element 30 becomes 0 or a tensile stress.

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