| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cleaning technique for a coater, which eliminates the nonuniformity of cleaning work while reducing the volume of a solvent to be used to improve cleaning capability. <P>SOLUTION: A cleaning device is provided for the coater. In the cleaning device, the solvent from a solvent supply passage 6 is mixed with air from an air supply passage 7 via an atomizing chamber 5 to form an atomized mixture, which is then supplied to a coating material piping system 1 of the coater. In the atomizing chamber, a solvent channel 51 connected to the solvent supply passage and an air channel 52 connected to the air supply passage are formed separately. A solvent nozzle 55 is formed on the front end of the solvent channel to jet the solvent from a throttle orifice 53 formed on the front end of the solvent nozzle, while an air nozzle 57 is formed on the front end of the air channel to jet air from a circular opening 56 encircling the solvent nozzle front end along its outer circumference. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
