| 摘要 |
The optical path used is switched between a first optical path and second optical path. The first optical path is used to make illumination light, output from a light source, transmits along the optical axis of an objective via an illumination system. The second optical path is used to guide the illumination light, output from the light source, to a transmits via the illumination system and the objective, thereby illuminating the target in a total reflection observation mode.
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