Magnetron for coating flat glass by sputtering comprises a longitudinal hollow target construction which rotates in a vacuum chamber, a magnet construction arranged within the target construction, and a coolant cycle

摘要

Magnetron (1) comprises a longitudinal hollow target construction which rotates in a vacuum chamber (2), a magnet construction (25) arranged within the target construction, and a coolant cycle (18) for cooling the target construction. The vacuum chamber is sealed using a first seal (21) and the coolant cycle is sealed using a second seal (22). Both seals are arranged separately from each other.