ALIGNER AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To confirm the exposure order easily when a bridging light exposure process is carried out on a board. SOLUTION: An aligner 1 links a first pattern A and a second pattern B together on a shot area on the board and exposes the patterns to the light. The aligner 1 has a display device 13 which displays the information on an bridging exposure order on the shot area. COPYRIGHT: (C)2005,JPO&NCIPI