UNIVERSAL VACUUM COUPLING FOR CYLINDRICAL TARGET

摘要

A coupling system (10) to releasably affix a cylindrical target (12) to a spindie (14) comprises the following parts: a) a spindle (14) terminating in a flange portion (16); b) a cylindrical target (12) having at its end a grooved outside circumferential surface (18); c) an interface ring (20) having a circumferential inner or outer surface (22) adapted to engage respectively with the grooved outside or inside circumferential surface (22) of the cylindrical target (12); d) a clamping ring (26) adapted to engage at its one side with the flange portion (16) and to engage radially at its other side with the interface ring (20) to hold the cylindrical target (12) to the spindle (14); e) one or more sealing rings (30) between the spindle (14) and the cylindrical target (12). The interface ring (20) makes it possible to use particular types of cylindrical targets (12) with other types of spindles (14).