ATTITUDE CONTROLLER, OPTICAL DEVICE, METHOD OF CONTROLLING ATTITUDE AND METHOD OF DRIVING OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an attitude controller in which self-retention is available, power consumption is reduced, and a high resolution driving is possible. SOLUTION: A plane part (object to be controlled) 1 is oscillatably and elastically supported by a supporting beam 2, a permanent magnet 3 is connected to the driving shaft 5 of a supersonic wave motor 4, and closely facing to the plane part 1. A magnetized object 1c of the plane 1 is vertically magnetized and the permanent magnet 3 is magnetized in the plane. The plane part 1 does not move when different magnetic poles are positioned on the left and the right sides of the permanent magnet 3. The plane part 1 is oscillated around the supporting beam 2 by the magnetic force which the permanent magnet 3 exerts on the magnetized object 1c when different magnetic poles are positioned above and under the permanent magnet 3 by turning the permanent magnet 3. The plane part 1 is oscillated around the supporting beam 2 in the opposite direction by the magnetic force which the permanent magnet 3 exerts on the magnetized object 1c when the permanent magnet 3 is turned in the opposite direction. The plane part 1 is oscillated by a smaller angle when the permanent magnet 3 is turned by an angle between 0 and 90 degrees. COPYRIGHT: (C)2005,JPO&NCIPI