| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator and a variable optical attenuator that comprise a reduced number of part items and that work through power saving. SOLUTION: The diaphragm type actuator has a thin-structured diaphragm on a substrate, with at least one or more diaphragm type actuator chips fixed on a base substrate, while the actuator chips are formed with an electrode for a heater one one side of the diaphragm and a reflection mirror on the same side or the opposite side. Then, opposed to the diaphragm type actuator deformed the diaphragm by applying an electric current to the electrode for a heater, the variable optical attenuator is provided with a first optical fiber for emitting light to a reflection mirror, a second optical fiber to which the light reflected on the reflection mirror is made incident, and a lens for transforming light into an image, each in the number same as that of the diaphragm type actuator chips. COPYRIGHT: (C)2005,JPO&NCIPI |
