| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave plasma generating method and a device wherein the shape or density of microwave plasma initially generated by a microwave can be changed. <P>SOLUTION: In the microwave plasma generating method, plasma generating gas is introduced into a vacuum container 14 and in which a plasma ball 6 is generated by the microwave. The method is constituted of a step in which the plasma ball 6 is generated by the microwave, a step in which a thermoelectron and heat are generated by electrifying a heat filament 5 arranged so as to surround the plasma ball from the circumference, and a step in which the electronic dissociation of the gas on the circumference of the plasma ball 6 or the thermal dissociation of the plasma gas is promoted by the thermoelectron, and in which the expansion of the circumference or the elevation of the circumferential density of the initially generated plasma is carried out. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
