发明名称 THIN FILM FORMATION METHOD AND DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method and a device for forming a thin film with a given pattern. SOLUTION: A given pattern is obtained by arranging a thin film on a base plate, arranging a solvent for dissolving the thin film in an island shape on the thin film, and blotting and removing the island-shaped solvent. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004281258(A) 申请公布日期 2004.10.07
申请号 JP20030071909 申请日期 2003.03.17
申请人 PIONEER ELECTRONIC CORP 发明人 NAGAYAMA KENICHI
分类号 H05B33/10;B05C5/00;B05C11/10;B05D3/10;B05D5/06;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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