| 发明名称 |
Method for fabricating a trench capacitor with an insulation collar |
| 摘要 |
A method for fabricating a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact, using a hard mask with a corresponding mask opening.
|
| 申请公布号 |
US2004197988(A1) |
申请公布日期 |
2004.10.07 |
| 申请号 |
US20030722360 |
申请日期 |
2003.11.26 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HEINECK LARS;KUDELKA STEPHAN;LUTZEN JORN;MOLL HANS-PETER;POPP MARTIN;SCHLOSSER TILL;STEINMETZ JOHANN |
| 分类号 |
H01L21/20;H01L21/334;H01L21/425;H01L21/8242;H01L27/108;H01L29/94;(IPC1-7):H01L21/824 |
主分类号 |
H01L21/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
