| 摘要 |
PROBLEM TO BE SOLVED: To form a film of a uniform thickness on the full surface of a substrate. SOLUTION: This method for forming a resin film is characterized in that in the process of delaying a liquid substance such as an adhesive annularly supplied between the substrates of optical disks or the like, or a liquid substance annularly supplied to an inner peripheral side of the substrate by high speed rotation, light ray irradiation is continuously or intermittently moved gradually from the inner peripheral side to an outer peripheral side, the liquid substance is half-hardened or hardened gradually from the inner peripheral side, and thus the thickness of the resin film by the liquid substance is established from the inner peripheral side. COPYRIGHT: (C)2005,JPO&NCIPI
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