| 摘要 |
PURPOSE: A semiconductor fabrication robot having an arm including one or more aligned holes is provided to check an aligning state of the arm by using a light emitting part and a light receiving part. CONSTITUTION: The first to the third arms(110,160,170) are used for transferring a semiconductor substrate. The first aligned holes(116) and the second aligned holes(118) are formed at each predetermined position of the first to the third arms. The first and the second light emitting parts(180,186) and the first and the second light receiving parts(190,196) are installed at each top part and each bottom part of the first and the second aligned holes when the first to the third arms are in the standby state.
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