| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a porous film for using various porous raw materials for forming the vacancy of a porous film regardless of the superiority/inferiority of its compatibility with super-critical fluid being extracted solvate, and increasing the degree of selective freedom of the vacancy size or skeletal structure. SOLUTION: This method for forming a porous film comprises a primary film formation process for forming a primary film where skeletal materials and vacancy raw materials are contained in mixed states, a decomposing process for decomposing porous raw materials configuring the primary film, and an extraction process for extracting the porous raw materials decomposed by the decomposition process by using super-critical fluid. In the decomposition process, the porous raw materials can be decomposed by using the super-critical fluid containing decomposition promoting components for promoting the decomposition of the porous raw materials. The decomposition and extraction of the porous raw materials can be simultaneously carried out by one process(decomposition/extraction process) at the time of using the super-critical fluid. COPYRIGHT: (C)2004,JPO&NCIPI
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