| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope for approaching a sample without interference, reducing an actuation distance, enhancing resolution, observing a probe of the scanning probe microscope and the sample by an arbitrary location scale factor, simply and easily maintained and having a compact sample stage since an objective lens of a scanning electron microscope is movable. SOLUTION: The scanning probe microscope detects action force between the sample placed in a sample chamber in a vacuum and the probe facing the sample or a current, and is provided with a charged particle microscope comprising a charged particle beam source for generating a charged particle beam, a lens barrel for internally fixing the charged particle beam source, the objective lens for focusing the charged particle beam on the sample and an objective lens moving means for changing a distance between the sample and the objective lens by moving the objective lens in the direction of a central axis of the charged particle beam. COPYRIGHT: (C)2004,JPO&NCIPI
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