| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for washing the surface of a material with dry ice snow or carbon dioxide without requiring complicated equipment and without heating the material. SOLUTION: In the method of washing the surface of a material, at the time when dry ice snow or carbon dioxide is sprayed on the surface of a material, and the surface of the material is washed, in a state where the surroundings of the material are held to an inert gas and/or carbon dioxide atmosphere, the dry ice snow or carbon dioxide is sprayed on the surface of the material. The washing device for the surface of the material comprises a sealable vessel whose inside can be held to an inert gas and/or carbon dioxide atmosphere, an exhaust port installed in the outer circumferential part of the vessel, a dry ice snow generation and gas spray apparatus provided penetratingly to the outer circumferential part of the vessel and performing the generation of dry ice snow and the spray of a gas for washing and an inert gas and/or carbon dioxide, and a gas feeding means for atmospheric holding feeding the inert gas and/or carbon dioxide to the apparatus. COPYRIGHT: (C)2004,JPO&NCIPI
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