Method and apparatus for treating exhaust gas

摘要

An apparatus for treating an exhaust gas has a pre-treatment section (1) for removing at least one of a powdery component, a water-soluble component and a hydrolytic component from the exhaust gas containing at least one of a fluorine compound and CO, and a heating oxidative decomposing section (2) for performing heating oxidative decomposition of the at least one of the fluorine compound and CO to detoxify the exhaust gas. The apparatus has a post-treatment section (4) for post-treating an acid gas such as HF which has been produced by the heating oxidative decomposition.