PATTERN FORMING APPARATUS AND METHOD FOR FORMING PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a pattern forming apparatus which can prevent misalignment of a pattern position from a pattern in the preceding step, and to provide a method for forming a pattern.

SOLUTION: The pattern forming apparatus 100 carries out steps of: scanning a base material 303 with a CCD camera 302 to acquire the image data or the like of the pattern in the preceding step (step 502); and subjecting the image data to image processing to acquire the measurement data relating to the position of the pattern in the preceding step (step 503). The pattern forming apparatus 100 carries out steps of: calculating the drawing data relating to the drawing position of the new pattern based on the measurement data (step 504); layering a transfer sheet 306 on the base material 303 (step 506); and scanning the substrate 303 by an irradiation head 301 to irradiate the transfer sheet 306 with a laser beam 307 based on the drawing data so as to transfer and draw the transfer layer onto the base material 303 (step 507).

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