摘要 |
PROBLEM TO BE SOLVED: To provide a photodetector and a radiation detecting device which maintains the ratio of an area occupied by a photoelectric conversion device in high, and improves a manufacturing yield. SOLUTION: A plurality of radiation receiving modules are provided on a circuit substrate while such a radiation receiving module is provided with a two-dimensional scintillator array 3 and a photoelectric conversion device 4. The photoelectric conversion device 4 is provided with a substrate 12 and photodiode arrays 14a-14d, buried into grooves 13a-13d formed on the upper surface of the substrate 12. The two-dimensional scintillator array 3 is provided with scintillator elements 10 arranged while coping with photodiode elements 15 provided on the photodiode arrays 14a-14d, and separators 11 arranged between the scintillator elements 10. The photoelectric conversion device is provided with such a structure whereby the manufacturing yield is improved, and the occupying area of the photoelectric conversion element or the photodiode element 15 on the substrate 12 is improved. COPYRIGHT: (C)2004,JPO&NCIPI
|