发明名称 |
Sputtering target and transparent conductive film |
摘要 |
A sputtering target containing a hexagonal laminar compound formed of indium oxide and zinc oxide and represented by In2O3(ZnO)m wherein m is an integer of 2 to 7 and further contains 0.01 to 1 at % of an oxide of a third element having a normal valence of 4 or more, and a transparent electrically conductive film formed therefrom. The sputtering target has a low volume resistivity and permits stable sputtering. The transparent electrically conductive film is excellent in etchability.
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申请公布号 |
US2004191530(A1) |
申请公布日期 |
2004.09.30 |
申请号 |
US20040483614 |
申请日期 |
2004.01.14 |
申请人 |
INOUE KAZUYOSHI;MATSUZAKI SHIGEO |
发明人 |
INOUE KAZUYOSHI;MATSUZAKI SHIGEO |
分类号 |
C23C14/34;(IPC1-7):B32B15/00 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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