| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a metal container for charging halogen-based gas provided with inner surface treatment by use of abrasive material, in which deterioration of purity due to increase of impurities other than water content or inner surface adsorption gas by aging will not occur after charging gas, and halogen-based gas of high purity. <P>SOLUTION: This metal container for charging halogen-based gas is composed in such a way that area of Si2s peak in X-ray photoelectron spectrum on the inner surface of the metal container, to which inner surface treatment is conducted by use of abrasive material, divided by area of Fe2P<SB>3/2</SB>peak is 0.3 or less. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
