| 摘要 |
PROBLEM TO BE SOLVED: To provide a continuous treatment apparatus which can perform a plurality of types of treatments to a surface to be treated of a body to be treated continuously and efficiently and can be reduced in size, and to provide a continuous treatment method. SOLUTION: The continuous treatment apparatus 10 continuously performs the plurality of types of treatments to the surface 31 to be treated of the body to be treated 30. The apparatus is equipped with a plurality of types of treatment units 11-18 which are arranged circularly to perform different treatment separately to the surface 31 to be treated of the body to be treated 30 under atmospheric pressure or pressure in the vicinity of atmospheric pressure, and a rotating operation part 20 which holds the body to be treated 30 on a mounting face and makes the surface 31 of the body to be treated 30 to be treated by the plurality of treatment units 11-18 while rotating the mounting face. COPYRIGHT: (C)2004,JPO&NCIPI
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