| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring a flow rate with a sufficient precision using light. SOLUTION: First of all, fluid flowing in a passage 1 is heated by a heating part 2. On the downstream side of its heating position, light is irradiated to the fluid from the light-emitting part 31 of a first detector 3. Light transmitted in the fluid is received by a light receiving part 32. A change in the absorbance spectrum of the received light is detected. On the basis of this change, arrival time of the heating fluid is obtained. On the basis of similar operation, an arrival time of the heating fluid is detected by a second detector 4. On the basis of the arrival time values obtained by the first and second detectors 3, 4, the flow velocity or flow rate of the heating fluid is measured precisely. COPYRIGHT: (C)2004,JPO&NCIPI
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