HEAT TREATMENT SYSTEM,申请号KR20047009507-传众专利搜索

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法人/股东/高管

发明名称	HEAT TREATMENT SYSTEM
摘要
申请公布号	KR20040083069(A)	申请公布日期	2004.09.30
申请号	KR20047009507	申请日期	2002.11.25
申请人		发明人
分类号	H01L21/28;H01L21/324;H01L21/00;H01L21/02;H01L21/205	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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