发明名称 HIGH FREQUENCY WAVE HEATED PLASMA MASS FILTER
摘要 <P>PROBLEM TO BE SOLVED: To provide a device for effectively generating and maintaining a multi-species plasma in a chamber, and for separating ions in plasma, easy to use and implement. <P>SOLUTION: A material separator includes a chamber and an electrode to create a radially oriented electric field in the chamber. Coils are provided to generate a magnetic field in the chamber. The separator further propagates a high-frequency electromagnetic wave into the chamber to convert the material into a multi-species plasma. With the crossed electric and magnetic fields, low mass ions in the multi-species plasma are placed on small orbit trajectories and exit through the end of the chamber while high mass ions are placed on large orbit trajectories for capture at the wall of the chamber. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004273458(A) 申请公布日期 2004.09.30
申请号 JP20040065454 申请日期 2004.03.09
申请人 ARCHIMEDES TECHNOLOGY GROUP INC 发明人 FREEMAN RICHARD L;MILLER ROBERT L;GILLELAND JOHN;OKAWA CHIHIRO
分类号 H05H1/46;H01J27/18;H01J37/08;H01J49/38;H01J49/42 主分类号 H05H1/46
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