| 摘要 |
PROBLEM TO BE SOLVED: To provide a table positioning device which is small/compact in size and low in cost. SOLUTION: A table positioning device 1 is provided with a movable table 4 which can be moved on a reference plane 3 in the directions of X and Y axes, two sets of table-moving mechanisms 5 and 6 for moving the movable table 4 in the directions of X and Y axes and one preload mechanism 9. The eccentric rotary cams 54 of the table-moving mechanisms 5 and 6 each come in contact with thrust-working faces 41 and 42 formed on the side of the movable table 4, and the pressure given by the preload mechanism 9 works on a pressurization working face 43 formed on the side of the movable table 4. The thrust-working faces 41 and 42 and the pressurization working face 43 each are located on three planes forming a triangle, respectively, when viewed from the direction perpendicular to the reference plane 3. The movable table 4 can be moved to a destination position in the directions of X and Y axes by individually rotating the eccentric rotary cams which keep the contact with the thrust-working faces 41 and 42. COPYRIGHT: (C)2004,JPO&NCIPI
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