Hot plate unit

摘要

The purpose of the present invention is to provide a hot plate unit (10) capable of carrying out temperature-rising and temperature-falling sufficiently quickly even if the diameter of a substrate (11) becomes wide and with which apparatus can be downsized. The present invention provides a hot plate unit (10) comprising a supporting case (22) and a substrate (11) equipped with a temperature adjustment means; said substrate (11) being fitted to the supporting case (22), wherein the thickness of the supporting case (22) is 50 mm or less.