| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-performance piezoelectric element using a thin film having a high degree of dipole orientation and composed of one or more materials selected from lithium niobate, tantalum niobate, barium titanate, lead titanate, lead zirconate, and lead zirconate titanate. <P>SOLUTION: After a lower electrode is formed on a silica glass substrate or stainless-steel substrate, a piezoelectric thin film is formed on the lower electrode by using one or more materials selected from lithium niobate, tantalum niobate, barium titanate, lead titanate, lead zirconate, and lead zirconate titanate by the sputtering method so that the degree of dipole orientation of the thin film may become≥55%. Then an upper electrode is formed on the piezoelectric thin film. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
