| 摘要 |
PROBLEM TO BE SOLVED: To obtain a microelectronic mechanical system (MEMS) element in which the non-returning of a mirror and the break of a hinge part are prevented even when a hinge part which turns a mirror is made slender, and such optical devices using the element as an optical attenuator, an optical switch and an optical scanner. SOLUTION: A mirror part 202 and an actuators 205 and 206 are connected to fixed parts 209 and 210 with a torsion springs (hinge part) 207 and 208, respectively, and receive a turning force around a turning axis 203 by an electrostatic attracting force of the actuators 205 and 206 and a silicon substrate 215 generated with a power source. The length in the thickness direction of a predetermined layer which composes the hinge part is longer than the length in the plane direction which is orthogonal to the thickness direction, thus a strong resistance is given against an impulsive force in the thickness direction. Further, a stopper part 219 deters an excessive movement in the horizontal direction. A shape which has a strong resistance against an impulsive force is adopted at a part which is connected to the both end parts of the hinge. COPYRIGHT: (C)2004,JPO&NCIPI |
