| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a highly efficient solar battery by lowering a contact resistance between a collecting electrode in the light receiving surface side and a high concentration n-type layer of the solar battery itself with the simplified process. <P>SOLUTION: At the electrode in the light receiving surface side of the solar battery, a metal silicide layer is provided on the substrate surface and an electrode is formed by covering the metal silicide layer with a plated layer. Moreover, an n-type impurity concentration at the lower side of the electrode in the light receiving surface side includes a high concentration n-type layer which is higher than the n-type impurity concentration of the lower side of the light receiving surface other than the electrode in the light receiving surface side. Here, metals included in the metal silicide layer may be selected from titanium, nickel, cobalt, or platinum. In addition, the plated layer formed over the metal silicide layer may include, at least as a metal, any of tin, zinc, silver, copper, or nickel. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
