INCLINATION STRUCTURE MATERIAL AND FUNCTIONAL ELEMENT EMPLOYING IT

摘要

PROBLEM TO BE SOLVED: To provide an inclination structure material in which a conventionally unavailable useful function can be added to a functional material on a substrate or a conventionally unavailable high performance can be attained without adding "compositional inclination", e.g. concentration of component, content of oxide or crystal structure, and to provide a functional element employing it.

SOLUTION: The inclination structure material comprises a substrate 1, and a functional material 2 deposited thereon and undergoes heat treatment while applying a desired temperature gradient to the functional material on the substrate in specified direction and region.

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