| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent breakage of a semiconductor substrate even when a shock is applied to a semiconductor substrate storage container for some reason. <P>SOLUTION: The semiconductor substrate storage container 10 comprises a container main body 1 provided with a first cylindrical part 4 for accommodating a semiconductor substrate 8, the cylindrical part 4 being provided with a slit 5 extended from an upper end 4A to a lower end 4B and having a predetermined width W1; and a cover 2 provided with a second cylindrical part 6 for covering the first cylindrical part 4 and also provided with a projection 7 which is provided at a position corresponding to the slit 5 of the first cylindrical part 4 on an inner surface 6C of the second cylindrical part 6. The projection 7 is extended from an upper end 6A to a lower end 6B and has such a predetermined width as to allow the projection to fit in the slit 5. A top surface 7A of the projection 7 of the cover 2 is formed so as to be in the same plane as an extension plane of the inner surface 4C of the first cylindrical part 4 when the projection 7 fits in the slit 5. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
