| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination with particles generated due to stripped porous silicon having a vary fragile structure formed on a substrate subjected to chemical conversion or particles generated from a bearing part due to the stress during the carriage. SOLUTION: A holding section 100a holds the inside of the outer circumferential part of a substrate, and a carrying section 100c carries that substrate. In this regard, the carrying section 100c alters the orientation of the substrate from a first state where the surface of the substrate is horizontal to a second state where the surface of the substrate extends along the vertical direction, or reversely. COPYRIGHT: (C)2004,JPO&NCIPI
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