| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp device which surely treats a workpiece by the vacuum ultraviolet ray emitted from the excimer lamp device and which has a long field life. SOLUTION: This is the excimer lamp device having an excimer lamp 1 and a cooling flow path 5 in which the cooling fluid to cool the excimer lamp flows, and it has a cooling fluid temperature adjusting means 6 in the cooling fluid path, and the surface temperature of the excimer lamp 1 cooled by the cooling fluid in the cooling side is 50-160°C. COPYRIGHT: (C)2004,JPO&NCIPI
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