发明名称 REMOVAL LIQUID FOR ALUMINUM OXIDE FILM, AND SURFACE TREATMENT METHOD FOR ALUMINUM OR ALUMINUM ALLOY
摘要 PROBLEM TO BE SOLVED: To provide a removal liquid for an aluminum oxide film by which a firm oxide film can easily and securely be removed without excessively etching the surface of aluminum or an aluminum alloy, and the object to be treated in which a thin film of aluminum or an aluminum alloy is deposited on the surface can also effectively be treated. SOLUTION: The removal liquid for removing an oxide film on the surface of aluminum or an aluminum alloy contains the salt of metal replaceable with aluminum, and acid. A metal film derived from the salt of the metal contained in the removal liquid can be deposited while the removal liquid suppresses its erosion as much as possible, and the removal liquid can activate the surface of the aluminum or aluminum alloy while allowing the aluminum or aluminum alloy to securely remain even in the case the aluminum or aluminum alloy is extremely thin. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004263267(A) 申请公布日期 2004.09.24
申请号 JP20030056633 申请日期 2003.03.04
申请人 C UYEMURA & CO LTD 发明人 UCHIDA HIROKI;YOSHIKAWA KAZUNORI
分类号 C23C18/18;C25D5/44;H01L21/308;H01L21/60;(IPC1-7):C25D5/44 主分类号 C23C18/18
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