| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator capable of increasing oscillation (angle of deviation) of a movable structure, and to provide its manufacturing process. <P>SOLUTION: A multilayer substrate 10 in which a thin film silicon layer 13 is formed on a silicon substrate 11 through a buried oxide film 12 is employed. A movable structure Em of torsional beam structure is constituted of the thin silicon layer 13. The movable structure Em is oscillated by generating a potential difference between a movable side comb tooth electrode in the movable structure Em and fixed side comb tooth electrodes 25a and 25b disposed oppositely to the movable side comb tooth electrode. The fixed side comb tooth electrodes 25a and 25b are formed in a through hole 15 made through the multilayer substrate 10. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
