SEMICONDUCTOR FORCE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor force sensor capable of preventing a diaphragm part from being damaged by a force transmitting means and improving output linearity. SOLUTION: The shape and size of an inner circumferential surface 11a of a support part 11 and the shape and size of the force transmitting means 3 are set in such a way that the force transmitting means 3 may come into contact with the inner circumferential surface 11a of the support part 11 when the force transmitting means 3 comes into contact with the diaphragm part 9 and is displaced toward the diaphragm part 9 by a prescribed amount with part of the force transmitting means 3 arranged in a space surrounded with both the diaphragm part 9 and the inner circumferential surface 11a of the support part 11. The force transmitting means 3 and the inner circumferential surface 11a constitute a stopper structure for restricting the amount of displacement of the force transmitting means 3 to the side of the diaphragm part 9. COPYRIGHT: (C)2004,JPO&NCIPI