| 摘要 |
PROBLEM TO BE SOLVED: To prevent seat leak, corrosion of a member caused by deposition and adherence of products generated by heat decomposition of gas, or clogging with the products, and to respond to size reduction of equipment of an evacuation system resulting in lowering a cost, and reduction in diameter of piping of the evacuation system for shortening evacuation time, in a diaphragm valve for a evacuation system applied to semiconductor manufacturing equipment. SOLUTION: The diaphragm valve 1 comprises: a body 2 having an inflow passage 6, an outflow passage 7, and a valve seat 8 formed therebetween; a diaphragm 3 disposed to the body 2 and brought into contact with or separated from the valve seat 8; and a drive means 4 disposed to the body 2 and makes the diaphragm 3 contact with or separated from the valve seat 8. A predetermined thickness of synthetic resin coat 5 is applied to a fluid contact part 25 between the body 2 and the diaphragm 3. COPYRIGHT: (C)2004,JPO&NCIPI
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