| 发明名称 |
Semiconductor device and method of manufacturing the same |
| 摘要 |
A semiconductor device includes an effective pattern region and at least one measurement mark region. The measurement mark region includes a measuring objective portion. The measuring objective portion has the same shape as a portion forming part of the effective pattern region.
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| 申请公布号 |
US6794763(B2) |
申请公布日期 |
2004.09.21 |
| 申请号 |
US20020290091 |
申请日期 |
2002.11.06 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
TOMOHIRO YASUHIKO |
| 分类号 |
G03F7/40;H01L21/027;H01L21/3205;H01L21/66;H01L21/82;H01L23/52;H01L23/544;(IPC1-7):H01L23/544 |
主分类号 |
G03F7/40 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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