| 摘要 |
PURPOSE: A laser beam machining device is provided to machine a workpiece at high speed and to secure excellent machining quality as shape, size, accuracy, and rectilinearness of a hole. CONSTITUTION: A laser beam machining device is composed of a beam split device, a deflection device, a beam composition device, and a machining lens. A laser beam is split into plural split beams with different optical paths by the beam split device. The optical paths of the split beam are combined in the same direction by the beam composition device and projected into one machining lens. The beam composition device comprises a total reflection/transmission-type beam composition device(31a,31b,31c) and a polarization-type beam composition device. Two optical paths of the split beam are unified in the same direction by the total reflection/transmission-type beam composition device and then the optical paths of two split beams and the other split beams are cooperated in the same direction by the polarization-type beam composition device.
|
