| 摘要 |
PURPOSE: An electrostatic chuck and an electrostatic chuck system having an improved cooling system are provided to maintain constantly temperature of refrigerant by dividing a flow path into the first flow path and the second flow path and forming the boundary between the first and the second flow path. CONSTITUTION: An electrostatic chuck includes a lower electrode, a plurality of flow paths(431,432) formed within the lower electrode, a plurality of refrigerant supply holes(413,415) for supplying the refrigerant into the inside of the lower electrode, and a plurality of refrigerant discharge holes(412,414) for discharging the refrigerant from the lower electrode. A boundary is formed on the flow paths in order to divide the flow paths. A plurality of heat transfer plates are installed at the flow paths.
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