发明名称 |
CHARGED PARTICLE BEAM DEVICE WITH CLEANING UNIT AND METHOD OF OPERATION THEREOF |
摘要 |
The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided. |
申请公布号 |
WO2004079770(A1) |
申请公布日期 |
2004.09.16 |
申请号 |
WO2004EP02140 |
申请日期 |
2004.03.03 |
申请人 |
ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER;JASINSKI, THOMAS |
发明人 |
JASINSKI, THOMAS |
分类号 |
H01J3/02;H01J37/06;H01J37/065;H01J37/30 |
主分类号 |
H01J3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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