| 摘要 |
<P>PROBLEM TO BE SOLVED: To resolve the reduction of the detection sensitivity of a vibration gyro of a type where the detection of an input angular speed is performed on the basis of the change of electric capacitance. <P>SOLUTION: When an angular speed is input around a center of axle of a first beam under a condition that a first beam 10 is bent and vibrated by a piezoelectric element 30, and a movable electrode 40 formed on a second beam 20 is excited in the X direction agreed with the extending direction of the second beam by this bending vibration, the movable electrode is displaced in the Z direction in parallel with a plate face of the movable electrode, and an opposite area between the movable electrode 40 and a fixed electrode 50 is changed by this displacement, whereby the input angular speed is measured by the change of electric capacitance. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
