| 摘要 |
PROBLEM TO BE SOLVED: To realize cost reduction and miniaturization of a color laser microscope and to provide a scanning microscope providing a color video in focus strictly. SOLUTION: The scanning microscope is equipped with a 1st optical system 1 condensing a laser beam L1 on a sample (w) by an objective 17 and also making the laser beam L1 two-dimensionally scan along the surface of the sample (w) and receiving the reflected light L1 of the laser beam L1 by using a photodetector 19b, and a 2nd optical system 2 irradiating the sample (w) with white light L2 and receiving the reflected light L2 of the white light L2 by using a color two-dimensional imaging device 24. By utilizing luminance information from the photodetector 19b of the 1st optical system 1 and color imaging information from the color two-dimensional imaging device 24 of the 2nd optical system 2, a signal for a color video is obtained. The scanning microscope is also equipped with a means for storing the height of a sample stage at a focusing point. Furthermore, the scanning microscope is equipped with a means for storing the color imaging information when the focusing point is attained. COPYRIGHT: (C)2004,JPO&NCIPI
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